1
3-2
2
4
5
ceramic
DC

Ceramics Parts

Ceramics

ZirconiaAlumina (Al2O3)

The parts of semiconductor equipment Stepper chuck, Vacuum chuck, Wafer chuck, Focus ring, Wafer clamp, Guide ring, Robot arm, Wafer Softer arm, Index table, Ceramics screw, Wide pocket, Base plate etc.

Zirconia (ZrO2)

Cutting tools, Dies, Guide roll, Bushing, Sleeve, Guide, Ball, Tube. Various guide roller, Milling media etc.

Silicon Carbide (SiC)

Mechanical seal parts, Nozzle, Machinery parts for wear resistance and corrosion resistance, Bushing, High temperature jig, Semiconductor tools, etc.

Silicon nitride (Si3N4)

All sort of thermal chuck, Bearing, Ball, Dies, Guide rolls, All kind of machinery parts for wear resistance, Engine components, etc.